JPH0226937Y2 - - Google Patents
Info
- Publication number
- JPH0226937Y2 JPH0226937Y2 JP15467584U JP15467584U JPH0226937Y2 JP H0226937 Y2 JPH0226937 Y2 JP H0226937Y2 JP 15467584 U JP15467584 U JP 15467584U JP 15467584 U JP15467584 U JP 15467584U JP H0226937 Y2 JPH0226937 Y2 JP H0226937Y2
- Authority
- JP
- Japan
- Prior art keywords
- housing
- window
- shutter
- vacuum
- gear
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 claims description 15
- 230000007246 mechanism Effects 0.000 claims description 3
- 238000007738 vacuum evaporation Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000005355 lead glass Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15467584U JPH0226937Y2 (en]) | 1984-10-13 | 1984-10-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15467584U JPH0226937Y2 (en]) | 1984-10-13 | 1984-10-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61125171U JPS61125171U (en]) | 1986-08-06 |
| JPH0226937Y2 true JPH0226937Y2 (en]) | 1990-07-20 |
Family
ID=30712667
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15467584U Expired JPH0226937Y2 (en]) | 1984-10-13 | 1984-10-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0226937Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101490423B1 (ko) * | 2008-02-15 | 2015-02-09 | 엘아이지에이디피 주식회사 | 플라즈마 처리장치 및 그에 구비되는 뷰 포트 |
-
1984
- 1984-10-13 JP JP15467584U patent/JPH0226937Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61125171U (en]) | 1986-08-06 |
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